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近年来,随着微光机电系统(MOEMS)技术的快速发展,光谱仪朝着微型化、低成本、高性能方向发展。基于MOEMS技术制作的闪耀光栅可集成于扫描微镜,其作为近红外光谱仪的核心部件,可实现单管探测器代替昂贵的阵列式探测器,以降低近红外光谱仪成本与体积。设计了一种高性能扫描光栅微镜,以提高光谱仪的探测灵敏度。扫描微镜表面集成高衍射效率光栅,背面制作电磁驱动线圈。采用光学软件与有限元方法对器件参数进行优化。仿真结果表明:扫描光栅微镜谐振频率为484.38Hz,最大扭转角度为±4.55°,在800~1800nm工作波长范围内,整体动态衍射效率在54%以上且最大值达90%。
In recent years, with the rapid development of micro-electro-mechanical system (MOEMS) technology, the spectrometer has been developed toward miniaturization, low cost and high performance. The blazed grating based on MOEMS technology can be integrated into the scanning micromirror. As a core part of the NIR spectrometer, the single-tube detector can replace the expensive array detector to reduce the cost and volume of the NIR spectrometer. A high performance scanning grating micromirror was designed to improve the detection sensitivity of the spectrometer. Scanning micromirror surface with high diffraction efficiency grating, the back of the electromagnetic drive coil. The software parameters and the finite element method are used to optimize the device parameters. The simulation results show that the scanning grating micromirror has a resonant frequency of 484.38 Hz and a maximum torsional angle of ± 4.55 °. The overall dynamic diffraction efficiency is above 54% and the maximum is 90% over the operating wavelength range of 800 to 1800 nm.