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研制出基于长程轮廓测量仪原理的Wolter I型反射镜面形检测装置。为提高该装置测量精度,重点介绍在原有装置基础上所做的扫描光学系统结构和探测器件两方面的改进。利用五角棱镜的光学特性消除导轨运动误差;用位置敏感探测器替代CCD探测器,提高面形检测装置的理论测量分辨率。对改进后新面形检测装置进行定标和样品实测实验,并与原实验数据进行比较。结果表明:新面形检测装置倾斜度测量均方根误差为1.7μrad,轮廓高度测量误差峰谷(PV)值为56nm,测量精度明显提高。为下一步精细加工Wolter I型反射镜面形奠定了基础。
Developed the Wolter I mirror surface detection device based on the principle of long-range profile measuring instrument. In order to improve the measuring accuracy of the device, the improvement of the scanning optical system structure and the detection device based on the original device is mainly introduced. The optical characteristics of the pentagonal prism are used to eliminate the movement error of the guide rail. The position sensitive detector is used instead of the CCD detector to improve the theoretical measurement resolution of the surface detection device. After calibration, the new face detection device was calibrated and measured by real samples and compared with the original experimental data. The results show that the root mean square error (RMS) of the inclination measurement of the new surface detection device is 1.7μrad and the peak-to-valley error (PV) value of the contour height measurement is 56nm. The measurement accuracy is obviously improved. This laid the foundation for the further processing of the Wolter I mirror profile.