应力诱发界面扩散下夹杂演化的有限元模拟

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应力作用下内连导线中的夹杂等缺陷会迁移和变形,从而影响电子器件的可靠性.论文基于应力诱发表面扩散机制下的弱解描述,推导了固-固界面在界面扩散机制下的有限单元控制方程,并数值分析了应力诱发界面扩散下金属内连导线中夹杂的形貌演化.研究结果表明:在拉压应力下,夹杂会发生分节或者圆形化;在双向等值拉应力下,夹杂存在着沿长轴生长和圆形化两种分叉趋势.并且存在着临界应力、临界形态比和临界线宽.形态比、应力越小或线宽、模量比越大,夹杂越易演化为圆形.
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