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针对直线式时栅位移传感器的结构特点,提出了动态测量的主要误差源。采用光栅尺作为母仪,直线式时栅位移传感器空间位置为光栅的测量值,将光栅测量值与直线式时栅位移传感器的预测值进行比较,从而得到动态测量的误差值。对误差值进行数据的截断和采样、异常数据剔除,然后对误差值进行幅值谱和相位谱分析,采用误差分离和谐波修正,研制高精度的直线式时栅位移传感器。
According to the structural characteristics of linear time-grating displacement sensor, the main error sources of dynamic measurement are proposed. The grating ruler is used as the mother instrument. The spatial position of the linear time-grating displacement sensor is the measured value of the grating, and the measured value of the grating is compared with the predicted value of the linear time-grating displacement sensor to obtain the error value of the dynamic measurement. The error value is truncated and sampled, and the abnormal data is removed. Then the amplitude and phase spectrum of the error value are analyzed, and the error and harmonic correction are used to develop the high-precision linear time-grating displacement sensor.