论文部分内容阅读
Optical and Electrical Properties of Hydrogenated Silicon Oxide Thin Films Deposited by PECVD
【机 构】
：
Laboratory of Thin Film Materials, College of Materials Science and Engineering, Beijing University
【出 处】
：
武汉理工大学学报（材料科学版）（英文版）
【发表日期】
：
2014年5期
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