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本文叙述了用放化分离法测定高纯硅中磷含量的实验方法,着重探讨了硅基体二级核反应干扰的计算以及存在此干扰下的方法灵敏度。方法灵敏度为7×10~(-4)ppm。
This paper describes the experimental method for the determination of phosphorus in high purity silicon by using the radiochemical separation method. The calculation of the interference of the secondary reaction of the silicon matrix and the sensitivity of the method in the presence of this interference are emphatically discussed. The sensitivity of the method is 7 × 10 ~ (-4) ppm.