论文部分内容阅读
叙述了AlGaN/GaNHEMT的特点及制造工艺，给出其测试结果，最大跨导～157ms/mm,由S参数测量推出器件的截止频率fT和最高振荡频率fmax分别为12GHz和24GHz。
The characteristics and manufacturing process of AlGaN / GaNHEMT are described. The test results are given. The maximum transconductance is 157ms / mm. The cut-off frequency fT and maximum oscillation frequency fmax of the device are 12GHz and 24GHz respectively.