SiGe spheres with different diameters are successfully fabricated on a virtual SiGe template using a laser irradiation method.The results from scanning electron microscopy and micro-Raman spectroscopy reveal that the diameter and Ge composition of the SiGe spheres can be well controlled by adjusting the laser energy density.In addition,the transmission electron microscopy results show that Ge composition inside the SiGe spheres is almost uniform in a well-defined,nearly spherical outline.As a convenient method to prepare sphere-shaped SiGe micro/nanostructures with tunable Ge compo-sition and size,this technique is expected to be useful for SiGe-based material growth and micro/optoelectronic device fabrication.