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用解析的方法对典型的基于SUMMIT工艺、静电活塞式驱动的分立式微镜进行了快速的静态与动态仿真,避免了有限元法的繁琐性。在微镜阵列变形时的孔径函数不能用解析表达式表示的情况下,应用MATLAB软件实现了快速傅里叶变换,得到了单色平面波经微镜阵列反射后的的远场衍射花样。
The static and dynamic simulation of a typical stand-alone micromirror based on the SUMMIT process and the electrostatic piston drive was carried out by analytical method, avoiding the tediousness of the finite element method. When the aperture function of micromirror array deformation can not be represented by analytic expression, the fast Fourier transform is realized by using MATLAB software and the far-field diffraction pattern of the monochromatic plane wave reflected by the micromirror array is obtained.