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自由曲面光学器件尽管有其突出的优点,但还远不能进入到现代光学系统的主流中去,问题之一就是精密检测.自由曲面光学器件的检测对于其精密加工不可或缺,并且两者通常具有不可分割的联系.文中阐述了与不同加工阶段相关的自由曲面光学器件检测中的问题和对策.在抛光前后宜分别采用坐标测量机和光学干涉仪,两种方法都存在一些问题有待解决.实际上坐标测量方法是近十几年来自由曲面测量的主流,这方面的研究主要集中于定位、误差补偿及采样策略等问题上.相比之下,自由曲面光学器件的光学测试是一个新的技术,其中不仅是分析软件上的存在问题,首要的还是缺乏适当的测量手段.尽管也可应用专门的轮廓测量仪,但它还存在诸多限制.结合子孔径拼接技术的干涉仪在某些自由曲面光学器件的测量中前景良好,不过对于更复杂的曲面,它同样无法进行测量.
One of the problems with free-form surface optical devices, although having their outstanding advantages, is far from being able to enter the mainstream of modern optical systems, and the detection of free-form surface optics is indispensable for its precision machining and both Which have inseparable relationship.This paper describes the problems and countermeasures in the inspection of free-form surface optical devices related to different processing stages.The coordinate measuring machine and optical interferometer should be adopted respectively before and after polishing, and there are some problems to be solved in both methods. In fact, the coordinate measurement method is the mainstream of free-form surface measurement in recent ten years, and the research in this area mainly focuses on the problems of positioning, error compensation and sampling strategy, etc. In contrast, optical testing of free-form surface optical devices is a new Technology, which is not only the analysis of software problems, the primary or the lack of appropriate measurement means.Although it is also possible to use a special contour measuring instrument, but it also has many limitations.With the sub-aperture splicing interferometer in some of the freedom The outlook is good in the measurement of curved optics, but it can not do the same for more complex surfaces the amount.