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概述了二维电子倍增器RLSG-MCP的发展概况和工艺的局限性,提出了用半导体工艺制作AT-MCP的技术途径,阐述了AT-MCP的优点;介绍了新型MSP电子倍增器的原理和特点,最后展望了电子倍增器的发展前景.
The development of the two-dimensional electron multiplier RLSG-MCP and the limitations of the process are summarized. The technical approach of making the AT-MCP by using the semiconductor technology is presented. The advantages of the AT-MCP are expounded. The principle and the principle of the new MSP electron multiplier are introduced. Features, and finally prospects for the development of electron multiplier.